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Title: On the physics of stiction and its impact on the reliability of microstructures
Authors: van Spengen, Willem Merlijn ×
Puers, Robert
De Wolf, Ingrid #
Issue Date: 2003
Publisher: VNU Science Press
Series Title: Journal of adhesion science and technology: the international journal of theoretical and basic aspects of adhesion science and its applications in all areas of technology vol:17 issue:4 pages:563-582
ISSN: 0169-4243
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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