Title: Interpretation of TOF-SIMS depth profiles from ultrashallow high-k dielectric stacks assisted by hybrid collisional computer simulation
Authors: Ignatova, V.A ×
Möller, W
Conard, Thierry
Vandervorst, Wilfried
Gijbels, R #
Issue Date: Jun-2005
Publisher: Springer-Verlag Heidelberg
Series Title: Applied Physics A, Materials Science & Processing vol:81 issue:1 pages:71-77
ISSN: 0947-8396
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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