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Title: High Performing 8 Å EOT HfO2 / TaN Low Thermal-Budget n-channel FETs with Solid-Phase Epitaxially Regrown (SPER) Junctions
Authors: Ragnarsson, Lars-Ake ×
Severi, Simone
Trojman, Lionel
Brunco, David
Johnson, Kevin D
Delabie, Annelies
Schram, Tom
Tsai, Wilman
Groeseneken, Guido
De Meyer, Christina
De Gendt, Stefan
Heyns, Marc #
Issue Date: 2005
Publisher: IEEE
Host Document: pages:234-235
Conference: Symposium on VLSI Technology. Digest of Technical Papers location:Leuven Belgium date:14/06/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
Molecular Design and Synthesis
× corresponding author
# (joint) last author

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