Title: Reduction of the premetal dielectric thermal budget for a 0.35mm technology
Authors: Waeterloos, Joost ×
Meynen, Herman
de Potter de ten Broeck, Muriel
Coenegrachts, Bart
Gao, Teng
Grillaert, Joost
Van den hove, Luc
Maex, Karen #
Issue Date: 1996
Host Document: pages:55-57
Conference: Proceedings of the 13th International VLSI Multilevel Interconnection Conference (VMIC); 18-20 June 1996; Santa Clara, CA, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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