Title: A new method for the lifetime determination of submicron metal interconnects by means of a parallel test structure
Authors: Vanstreels, Kris ×
D'Olieslaeger, Marc
De Ceuninck, Ward
D'Haen, Jan
Maex, Karen #
Issue Date: 2005
Series Title: Microelectronics Reliability vol:45 issue:03/04/07 pages:753-759
ISSN: 0026-2714
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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