ITEM METADATA RECORD
Title: On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers
Authors: Petry, Jasmine ×
Vandervorst, Wilfried
Pantisano, Luigi
Degraeve, Robin #
Issue Date: May-2005
Series Title: Microelectronics Reliability vol:45 issue:5-6 pages:815-818
ISSN: 0026-2714
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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