Title: Piezoelectric actuation for application in RF-MEMS switches
Authors: Klaasse, Gerard ×
Puers, Robert
Tilmans, Harrie #
Issue Date: 2004
Publisher: SPIE
Host Document: pages:174-180
Conference: MEMS, MOEMS, and Micromachining location:Leuven Belgium date:29/04/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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