|ITEM METADATA RECORD
|Title: ||Removing metal gate process residues|
|Authors: ||Snow, Jim ×|
Vermeyen, K #
|Issue Date: ||2004 |
|Series Title: ||European Semiconductor vol:26 issue:4 pages:61-62|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Clinical Residents Medicine|
× corresponding author|
# (joint) last author|
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