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Title: Integration of high-K gate dielectrics - wet etch, cleaning and surface conditioning
Authors: De Gendt, Stefan ×
Beckx, Stephan
Caymax, Matty
Claes, Martine
Conard, Thierry
Delabie, Annelies
Deweerd, Wim
Hellin, David
Kraus, Harald
Onsia, Bart
Paraschiv, Vasile
Puurunen, Riikka
Rohr, Erika
Snow, Jim
Tsai, Wilman
Van Doorne, Patrick
Van Elshocht, Sven
Vertommen, Johan
Witters, Thomas
Heyns, Marc #
Issue Date: 2004
Publisher: ECS
Host Document: pages:67-77
Conference: Cleaning Technology in Semiconducting Device Manufacturing VIII. Proceedings of the International Symposium location:Leuven Belgium date:13/10/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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