Title: Evaluation of megasonic cleaning systems for particle removal efficiency and damaging
Authors: Vereecke, Guy ×
Holsteyns, Frank
Veltens, Tom
Lux, Marcel
Arnauts, Sophia
Kenis, Karine
Vos, Rita
Mertens, Paul
Heyns, Marc #
Issue Date: 2004
Publisher: ECS
Host Document: pages:145-152
Conference: Cleaning Technology in Semiconductor Device Manufacturing VIII. Proceedings of the International Symposium location:Leuven Belgium date:13/10/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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