Title: High-k dielectrics integration prospects
Authors: Kubicek, Stefan ×
Van Elshocht, Sven
Delabie, Annelies
Yamamoto, Kazuhiko
Beckx, Stephan
Claes, Martine
Van Hoornick, Nausikaa
Kwak, Dong Hwa
Hyun, Sangjin
Rothschild, Aude
Veloso, Anabela
Kottantharayil, Anil
Lujan, Guilherme
Kittl, Jorge
Lauwers, Anne
Kaushik, Vidya
Niwa, Masaaki
De Gendt, Stefan
Heyns, Marc
Jurczak, Malgorzata
Biesemans, Serge #
Issue Date: 2005
Publisher: Eelctrochemical Society
Host Document: pages:169-192
Conference: ULSI Process Integration IV location:Leuven Belgium date:15/05/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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