Title: Challenges in integration of metal gate high-k dielectrics gate stacks
Authors: Tsai, W ×
Ragnarsson, Lars-Ake
Schram, Tom
De Gendt, Stefan
Heyns, Marc #
Issue Date: 2004
Publisher: ECS
Host Document: pages:321-327
Conference: Advanced Short-Time Thermal Processing for Si-Based CMOS Devices II location:Santa Clara, CA USA date:09/05/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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