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Title: Large-area remote plasma deposition of oxides and nitrides
Authors: Beaucarne, Guy ×
Said, Khalid
Vermeulen, Tom
Duerinckx, Filip
Poortmans, Jef
Nijs, Johan #
Issue Date: 1997
Host Document: pages:1770-1773
Conference: 14th European Photovoltaic Solar Energy Conference and Exhibition. Proceedings of the International Conference; 30 June - 4 July location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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