|ITEM METADATA RECORD
|Title: ||Hot hole induced degradation of oxynitrides|
|Authors: ||Sii, H. K|
|Issue Date: ||1997 |
|Conference: ||SISC-Conference; December 1997; Charleston, South-Carolina, USA.|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.