ITEM METADATA RECORD
Title: Hot hole induced degradation of oxynitrides
Authors: Sii, H. K
Zhang, Jenny
Groeseneken, Guido
Issue Date: 1997
Conference: SISC-Conference; December 1997; Charleston, South-Carolina, USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors

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