Title: Rapid thermal annealing of spin-coated phosphoric acid films for shallow junction formation
Authors: Sivoththaman, Sivanarayanamoorthy ×
Laureys, Wim
Nijs, Johan
Mertens, Robert #
Issue Date: 1997
Series Title: Applied Physics Letters vol:71 pages:392-394
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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