Title: Optimized HF solutions in ULSI technology
Authors: Teerlinck, Ivo ×
Mertens, Paul
Vos, Rita
Meuris, Marc
Heyns, Marc #
Issue Date: 1997
Host Document: pages:250-263
Conference: Proceedings of the Symposium on Environmental Aspects of Electrochemical Technology: Applications in Electronics; Symposium held location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science