ITEM METADATA RECORD
Title: Optimized HF solutions in ULSI technology
Authors: Teerlinck, Ivo ×
Mertens, Paul
Vos, Rita
Meuris, Marc
Heyns, Marc #
Issue Date: 1997
Host Document: pages:250-263
Conference: Proceedings of the Symposium on Environmental Aspects of Electrochemical Technology: Applications in Electronics; Symposium held location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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