ITEM METADATA RECORD
Title: Secondary ion signal variation during oxygen build-up in Si
Authors: Tian, Chunsheng ×
Beyer, Gerald
Vandervorst, Wilfried
Kilner, J. A #
Issue Date: 1997
Host Document: pages:287-90
Conference: Secondary Ion Mass Spectrometry - SIMS X : Proceedings of the 10th International Conference on Secondary Ion Mass Spectrometry; location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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