Title: Effects of oxygen flooding on sputtering and ionization processes during ion bombardment
Authors: Tian, Chunsheng ×
Vandervorst, Wilfried #
Issue Date: 1997
Series Title: Journal of Vacuum Science & Technology A, Vacuum, Surfaces and Films vol:15 pages:452-459
ISSN: 0734-2101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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