|ITEM METADATA RECORD
|Title: ||Effects of oxygen flooding on sputtering and ionization processes during ion bombardment|
|Authors: ||Tian, Chunsheng ×|
Vandervorst, Wilfried #
|Issue Date: ||1997 |
|Series Title: ||Journal of Vacuum Science & Technology A, Vacuum, Surfaces and Films vol:15 pages:452-459|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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