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Title: Nanopotentiometry - Local potential measurements in CMOS transistors using atomic force spectroscopy
Authors: Trenkler, Thomas ×
De Wolf, Peter
Vandervorst, Wilfried
Hellemans, Louis #
Issue Date: 1997
Host Document: pages:58.1-58.8
Conference: Proceedings of the 4th International Workshop on the Measurement, Characterization and Modelling of Ultra-Shallow Doping Profile
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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