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Title: Two-dimensional profiling in silicon using conventional and electrochemical selective etching
Authors: Trenkler, Thomas ×
Vandervorst, Wilfried
Hellemans, Louis #
Issue Date: 1997
Host Document: pages:55.1-55.9
Conference: 4th International Workshop on the Measurement, Characterization and Modelling of Ultra-Shallow Doping Profiles in Semiconductors
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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