|ITEM METADATA RECORD
|Title: ||Comparative analysis of the nucleation and growth of copper on different low-k polymers|
|Authors: ||Zaporojtchenko, V ×|
Maex, Karen #
|Issue Date: ||2002 |
|Host Document: ||pages:L8.1|
|Conference: ||Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics II date:16/04/01|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.