Title: Comparative analysis of the nucleation and growth of copper on different low-k polymers
Authors: Zaporojtchenko, V ×
Erichsen, J
Strunskus, T
Behnke, K
Faupel, F
Baklanov, Mikhaïl
Maex, Karen #
Issue Date: 2002
Publisher: MRS
Host Document: pages:L8.1
Conference: Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics II date:16/04/01
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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