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Title: Narrow trench corrosion of copper damascene interconnects
Authors: Ernur, Didem ×
Kondo, S
Maex, Karen #
Issue Date: 2002
Series Title: Japanese Journal of Applied Physics. Part 1 vol:41 issue:12 pages:7338-7344
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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