ITEM METADATA RECORD
Title: Substrate bonding techniques for CMOS processed wafers
Authors: van der Groen, Sonja ×
Rosmeulen, Maarten
Baert, Kris
Jansen, Philippe
Deferm, Ludo #
Issue Date: 1997
Series Title: Journal of Micromechanics and Microengineering vol:7 pages:108-110
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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