Title: Substrate bonding techniques for CMOS processed wafers
Authors: van der Groen, Sonja ×
Rosmeulen, Maarten
Baert, Kris
Jansen, Philippe
Deferm, Ludo #
Issue Date: 1997
Series Title: Journal of Micromechanics and Microengineering vol:7 pages:108-110
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science