Title: CMOS compatible wafer scale adhesive bonding for circuit transfer
Authors: van der Groen, Sonja ×
Rosmeulen, Maarten
Jansen, Philippe
Baert, Kris
Deferm, Ludo #
Issue Date: 1997
Host Document: pages:629-632
Conference: Transducers '97. 1997 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers. Vol. 1; June 19 location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science