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|ITEM METADATA RECORD
|Title: ||Barrier integrity effect on leakage mechanism and dielectric reliability of Copper/OSG interconnects|
|Authors: ||Li, Yunlong ×|
Maex, Karen #
|Issue Date: ||2005 |
|Conference: ||Materials, Technology, and Reliability of Interconnects location:San Francisco, CA, USA date:28/03/05|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author|
# (joint) last author|
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