Characterization of the growth of atomic layer deposited WNxCy films on various substrates
Publication date:
2005-01-01
Author:
Martin Hoyas, Ana
Travaly, Youssef ; Schuhmacher, Jorg ; Sajavaara, Timo Pekka ; Whelan, Caroline ; Eyckens, Brenda ; Richard, Olivier ; Giangrandi, Simone ; Brijs, Bert ; Jonas, AM ; Vantomme, André ; Vandervorst, Wilfried ; Celis, Jean-Pierre ; Maex, Karen