Title: Bombardment induced charging and electrical properties of ion beam synthesised silicon oxides
Authors: Beyer, Gerald ×
Vandervorst, Wilfried
Kilner, J. A
Wittmaack, K #
Issue Date: 1997
Host Document: pages:387-90
Conference: Secondary Ion Mass Spectrometry - SIMS X : Proceedings of the 10th International Conference on Secondary Ion Mass Spectrometry; location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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