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Title: Poly-SiGe, a superb material for MEMS
Authors: Witvrouw, Ann ×
Gromova, Maria
Mehta, Anshu
Sedky, Sherif
De Moor, Piet
Baert, Kris
Van Hoof, Chris #
Issue Date: 2004
Publisher: MRS
Host Document: MRS Proceedings vol:782
Conference: 2003 MRS Fall Meeting - Symposium A – Micro- and Nanosystems location:Boston, USA date:Dec 1-5 2003
Article number: A2.1
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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