This item still needs to be validated !
|ITEM METADATA RECORD
|Title: ||Poly-SiGe, a superb material for MEMS|
|Authors: ||Witvrouw, Ann ×|
De Moor, Piet
Van Hoof, Chris #
|Issue Date: ||2004 |
|Host Document: ||MRS Proceedings vol:782|
|Conference: ||2003 MRS Fall Meeting - Symposium A – Micro- and Nanosystems location:Boston, USA date:Dec 1-5 2003|
|Article number: ||A2.1|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
ESAT - MICAS, Microelectronics and Sensors
× corresponding author|
# (joint) last author|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.