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|ITEM METADATA RECORD
|Title: ||Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integration|
|Authors: ||Kerber, Andreas|
De Gendt, Stefan
|Issue Date: ||2002 |
|Conference: ||Workshop on Dielectrics in Insulators - WODIM location:Leuven Belgium date:18/11/02|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
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