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Title: Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integration
Authors: Kerber, Andreas
Cartier, Eduard
Degraeve, Robin
Roussel, Philippe
Pantisano, Luigi
Kauerauf, Thomas
Groeseneken, Guido
De Gendt, Stefan
Heyns, Marc
Issue Date: 2002
Conference: Workshop on Dielectrics in Insulators - WODIM location:Leuven Belgium date:18/11/02
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors

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