Title: Effect of N2 annealing on AlxZryOz oxide
Authors: Petry, Jasmine
Richard, Olivier
Vandervorst, Wilfried
Conard, Thierry
Chen, Jerry
Cosnier, Vincent
Issue Date: 2002
Conference: AVS 49th International Symposium location:Leuven Belgium date:03/11/02
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous

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