|ITEM METADATA RECORD
|Title: ||Comparison of electric properties of ultra-thin thermal and plasma nitrided silicon oxides with different post-deposition treatments using C-AFM|
|Authors: ||Polspoel, Wouter ×|
Benedetti, Alessandro #
|Issue Date: ||Jun-2005 |
|Series Title: ||Microelectronic Engineering vol:80 pages:436-439|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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