Title: Comparison of electric properties of ultra-thin thermal and plasma nitrided silicon oxides with different post-deposition treatments using C-AFM
Authors: Polspoel, Wouter ×
Vandervorst, Wilfried
Petry, Jasmine
Conard, Thierry
Benedetti, Alessandro #
Issue Date: Jun-2005
Series Title: Microelectronic Engineering vol:80 pages:436-439
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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