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Title: Optimized diode analysis of electrical silicon substrate properties
Authors: Czerwinski, A ×
Tomaszewski, D
Gibki, J
Bakowski, A
Klima, K
Katchki, J
Simoen, Eddy
Claeys, Cor #
Issue Date: 1997
Host Document: pages:218-227
Conference: Proceedings of the Symposium on Crystalline Defects and Contamination Control: Their Impact and Control in Device Manufacturing
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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