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|ITEM METADATA RECORD
|Title: ||Optimized diode analysis of electrical silicon substrate properties|
|Authors: ||Czerwinski, A ×|
Claeys, Cor #
|Issue Date: ||1997 |
|Host Document: ||pages:218-227|
|Conference: ||Proceedings of the Symposium on Crystalline Defects and Contamination Control: Their Impact and Control in Device Manufacturing|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author|
# (joint) last author|
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