Title: Interfacial B-profiling: an (un)solvable problem with SIMS
Authors: Vandervorst, Wilfried
Janssens, Tom
Huyghebaert, Cedric
Brijs, Bert
Fruehauf, Jens
Issue Date: 2002
Conference: SIMS-US Workshop location:Leuven Belgium date:29/04/02
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Nuclear and Radiation Physics Section

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