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Title: Minimization of the MuGFET contact resistance by integration of NiSi contacts on epitaxially raised source/drain regions
Authors: Dixit, Abhisek ×
Rooyackers, Rita
Leys, Frederik
Kaiser, Monja
Weemaes, R
Ferain, Isabelle
De Keersgieter, An
Collaert, Nadine
Surdeanu, Radu
Goodwin, Michael
Zimmerman, Paul
Loo, Roger
Caymax, Matty
Jurczak, Malgorzata
Biesemans, Serge
De Meyer, Christina #
Issue Date: 2005
Publisher: IEEE
Host Document: pages:445-448
Conference: Proceedings of the 35th European Solid-State Device Research Conference - ESSDERC location:Leuven Belgium date:12/09/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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