Title: P implantation doping of Ge: diffusion, activation, and recrystallization
Authors: Satta, Alessandra ×
Janssens, Tom
Clarysse, Trudo
Simoen, Eddy
Meuris, Marc
Benedetti, Alessandro
Hoflijk, Ilse
De Jaeger, Brice
Demeurisse, Caroline
Vandervorst, Wilfried #
Issue Date: Jan-2006
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:24 issue:1 pages:494-498
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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