Title: Silicon surface metal contamination measurements using grazing-emission XRF spectrometry
Authors: De Gendt, Stefan ×
Kenis, Karine
Baeyens, Martien
Mertens, Paul
Heyns, Marc
Wiener, G
Kidd, S. J
Knotter, D. M
de Bokx, P. K #
Issue Date: 1997
Host Document: pages:397
Conference: Science and Technology of Semiconductor Surface Preparation; April 1-3, 1997. San Francisco, Calif., USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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