ITEM METADATA RECORD
Title: Impact of iron contamination and SC1 generated roughness on 5nm gate oxides
Authors: De Gendt, Stefan
Knotter, D. M
Kenis, Karine
Mertens, Paul
Heyns, Marc
Issue Date: 1997
Conference: Productronica Conference : Semiconductor Equipment and Materials - Contamination Control and Defect Reductions; 11-14 November 1 location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine

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