ITEM METADATA RECORD
Title: Modeling of bombardment induced oxidation of silicon with and without oxygen flooding
Authors: De Witte, Hilde
Vandervorst, Wilfried
Gijbels, Renaat
Issue Date: 1997
Conference: SIMS XI; 8-12 September 1997; Orlando, Calif., USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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