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Title: A reliability study of titanium silicide lines using micro-raman spectroscopy and electron microscopy
Authors: De Wolf, Ingrid ×
Howard, Dave
Rasras, Mahmoud
Lauwers, A
Maex, Karen
Groeseneken, Guido
Maes, Herman #
Issue Date: 1997
Series Title: Microelectronics Reliability vol:37 pages:1591-1594
ISSN: 0026-2714
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Semiconductor Physics Section
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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