Title: The use of liquid rubber in micromachining focussed on flexible large area biocompatible membranes
Authors: Verhaegen, Katarina ×
Baert, Kris
Sansen, Willy
Hermans, Lou
Mertens, Robert #
Issue Date: 1997
Host Document: pages:1423-1426
Conference: Transducers '97. 1997 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers. Vol. 2; June 19 location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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