|ITEM METADATA RECORD
|Title: ||Investigation of the correlation between parameters defining the state of sputtered particles|
|Authors: ||Vlekken, J|
De Schepper, Patrick
|Issue Date: ||1997 |
|Conference: ||SIMS XI; 8-12 September 1997; Orlando, Fl., USA.|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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