Title: Investigation of the correlation between parameters defining the state of sputtered particles
Authors: Vlekken, J
Croes, Kris
D'olieslaeger, Marc
Knuyt, G
Vandervorst, Wilfried
De Schepper, Patrick
Issue Date: 1997
Conference: SIMS XI; 8-12 September 1997; Orlando, Fl., USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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