Title: New sensitive electrical measurement techniques for the study of stress induced voiding
Authors: Witvrouw, Ann
Drijbooms, Christel
Bender, Hugo
Maex, Karen
Issue Date: 1998
Host Document: Conference Proceedigs ULSI XIII pages:279-285
Conference: Advanced Metallization and Interconnect Systems for ULSI Applications location:Tokyo, Japan date:Oct 21-22 1997
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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