|ITEM METADATA RECORD
|Title: ||New sensitive electrical measurement techniques for the study of stress induced voiding|
|Authors: ||Witvrouw, Ann|
|Issue Date: ||1998 |
|Host Document: ||Conference Proceedigs ULSI XIII pages:279-285|
|Conference: ||Advanced Metallization and Interconnect Systems for ULSI Applications location:Tokyo, Japan date:Oct 21-22 1997|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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