|ITEM METADATA RECORD
|Title: ||Buckling instabilities of thin cap layers deposited onto low-k dielectric films|
|Authors: ||Iacopi, Francesca|
|Issue Date: ||2002 |
|Conference: ||MRS Fall Meeting Symposium B: Polymer/Metal Interfaces - Fundamentals, Properties, and Applications location:Boston, MA, USA date:02/12/02|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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