Title: Buckling instabilities of thin cap layers deposited onto low-k dielectric films
Authors: Iacopi, Francesca
Brongersma, Sywert
Maex, Karen
Abell, Thomas
Issue Date: 2002
Conference: MRS Fall Meeting Symposium B: Polymer/Metal Interfaces - Fundamentals, Properties, and Applications location:Boston, MA, USA date:02/12/02
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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