Title: Transient sputter yields, build-up of the altered layer and Ge-segregation as a function of the O2+ ion-fluence in SiGe
Authors: Huyghebaert, Cedric ×
Brijs, Bert
Janssens, Tom
Vandervorst, Wilfried #
Issue Date: 2003
Series Title: Applied Surface Science vol:203-204 pages:56-61
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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