Title: Ni-FUSI on high-k as a candidate for 65nm LSTP CMOS
Authors: Kubicek, Stefan ×
Veloso, Anabela
Kottantharayil, Anil
Hayashi, Shigenori
Yamamoto, Kazuhiko
Mitsuhashi, Riichirou
Kittl, Jorge
Lauwers, Anne
Horii, S
Harada, Y
Kubota, M
Niwa, Masaaki
De Gendt, Stefan
Heyns, Marc
Jurczak, Malgorzata
Biesemans, Serge #
Issue Date: Apr-2005
Publisher: ERSO/ITRI
Host Document: pages:99-100
Conference: Proceedings IEEE VLSI-TSA International Symposium on VLSI Technology location:Leuven Belgium date:25/04/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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