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Title: Cross-sectional nano-srp dopant profiling
Authors: De Wolf, Peter ×
Clarysse, Trudo
Vandervorst, Wilfried
Hellemans, Louis
Niedermann, P
Hanni, W #
Issue Date: 1997
Host Document: pages:56.1-56.10
Conference: Proceedings of the 4th International Workshop on the Measurement, Characterization and Modelling of Ultra-Shallow Doping Profile location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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