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Title: ULSI-device characterization using nano-SRP
Authors: De Wolf, Peter ×
Trenkler, Thomas
Clarysse, Trudo
Vandervorst, Wilfried
Hellemans, Louis #
Issue Date: 1997
Host Document: pages:92-101
Conference: Proceedings of Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices ; 6-8 May 1997 location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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