Title: A wet release process for fabricating slender and compliant suspended micro-mechanical structures
Authors: Pamidighantam, Sayanu ×
Laureyn, Wim
Rusu, Cristina
Baert, Kris
Puers, Robert
Tilmans, Harrie #
Issue Date: 2003
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and actuators. A: Physical vol:103 issue:01/02/07 pages:202-212
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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