Title: Study of the transient phenomena in SIMS depth profiling using combined SIMS-RBS
Authors: Deleu, Jeroen
Brijs, Bert
Vandervorst, Wilfried
Issue Date: 1997
Conference: SIMS XI; 8-12 September 1997; Orlando, Florida, USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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