Title: Why we need to rethink copper low-k reliability issues
Authors: Maex, Karen ×
Groeseneken, Guido #
Issue Date: 2003
Series Title: Solid State Technology vol:46 issue:1 pages:30
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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